Sulfidization of GaAs in alcoholic solutions: A method having an impact on efficiency and stability of passivation

Materials Science and Engineering B

Volumn 44, Issue 1-3, 1997, Pages 376-379

  Bessolov, Vasily N ^a   Konenkova, Elena V ^a   Lebedev, Mikhail V ^a  

^a IOFFE INSTITUTE   (Russian Federation)

Author keywords

Alcohols; Oxide layer; Photoluminescence; Sulfur passivation

Indexed keywords

ALCOHOLS; ORGANIC SOLVENTS; PASSIVATION; PERMITTIVITY; PHOTOLUMINESCENCE; SULFUR; X RAY PHOTOELECTRON SPECTROSCOPY;

SULFIDIZATION;

SEMICONDUCTING GALLIUM ARSENIDE;

EID: 0000627051     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(96)01816-8     Document Type: Article

References (9)

1. T. Tiedje, K.M. Kolbow, D. Rogers, Z. Fu and W. Eberhardt, J. Vac. Sci. Technol., B7 (1989) 837.
2. S. Weiguo, Appl. Phys., A52 (1991) 75.
3. A.S. Weling, K.K. Kamath and P.R. Vaya, Thin Solid Films, 215 (1992) 179.
4. E.A. Moelwyn-Hughes, The Chemical Statics and Kinetics of Solutions, Academic Press, New York, 1971.
5. V.N. Bessolov, A.F. Ivankov, E.V. Konenkova and M.V. Lebedev, Tech. Phys. Lett., 21 (1995) 20.
6. V.N. Bessolov, M.V. Lebedev, E.B. Novikov and B.V. Tsarenkov, J. Vac. Sci. Technol., B11 (1993) 10.
7. V.N. Bessolov, A.F. Ivankov and M.V. Lebedev, J. Vac. Sci. Technol., B13 (1995) 1018.
8. M.S. Carpenter, M.R. Melloch, B.A. Cowans, Z. Dardas and W.N. Delgass, J. Vac. Sci. Technol., B7 (1989) 845.
9. V.N. Bessolov, E.V. Konenkova and M.V. Lebedev, J. Vac. Sci. Technol. B14 (1996) 2761.