Enhanced SiO2 formation at exposed polymer surface by CVD method

European Polymer Journal

Volumn 34, Issue 9, 1998, Pages 1295-1301

  Shirai, Masamitsu ^a   Umeda, Shigemi ^a   Tsunooka, Masahiro ^a   Matsuo, Takahiro ^b  

^a Osaka Prefecture University   (Japan)

^b PANASONIC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000622367     PISSN: 00143057     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0014-3057(97)00268-1     Document Type: Article

References (17)

1. Stillwagon, L.E., Vasile, M.J., Baiocchi, F.A., Silverman, P.J. and Taylor, G.N., Microelectron. Eng., 1987, 6, 381.
2. Taylor, G.N., Nalamasu, O. and Stillwagon, L.E., Microelectron. Eng., 1989, 9, 513.
3. Nalamasu, O. and Taylor, G.N., Proc. SPIE, 1989, 1086, 186.
4. Abali, L.N., Bobbio, S.M., Bohland, J.F., Calabrese, G.S., Gulla, M., Pavelcheck, E.K. and Sricharoenchaikit, P., Microelectron. Eng., 1991, 13, 93.
5. Calvert, J.M., Dulcey, C.S., Peckera, M.C., Schnur, J.M., Geoger, J.H. Jr, Calabrese, G.S. and Sricharoenchaikit, P., Solid State Technol., 1991, 34, 77.
6. Shirai, M., Hayashi, M. and Tsunooka, T., Macromolecules, 1992, 25, 195.
7. Shirai, M., Kinoshita, T., Sumino, T., Miwa, T. and Tsunooka, M., Chem. Mater., 1993, 5, 98.
8. Shirai, M., Sumino, T. and Tsunooka, M., Eur. Polym. J., 1993, 29, 831.
9. Shirai, M., Yatsuo, T. and Tsunooka, M., J. Photopolym. Sci. Technol., 1996, 9, 273.
10. Kamogawa, H., Kanazawa, A., Kadoya, M., Naito, F. and Nanasawa, M., Bull. Chem. Soc. Jpn, 1983, 56, 762.
11. Shirai, M., Masuda, T., Tsunooka, M. and Tanaka, M., Makromol. Chem. Rapid Commun., 1984, 5, 689.
12. Murov, S. L., Handbook of Photochemistry. Marcel Dekker, New York, 1973, p. 119.
13. Shirai, M., Kinoshita, H. and Tsunooka, M., Eur. Polym. J., 1992, 28, 379.
14. Ito, H. and Ueda, M., Macromolecules, 1988, 21, 1475.
15. Bradley, D.C., Chem. Rev., 1989, 89, 1317.
16. Hench, L.L. and West, J.K., Chem. Rev., 1990, 90, 33.
17. Smith, K.A., Macromolecules, 1987, 20, 2514.