NiGe-based ohmic contacts to n-type GaAs

Journal of Electronic Materials

Volumn 25, Issue 11, 1996, Pages 1684-1694

  Furumai, Masaki ^a   Oku, Takeo ^a   Ishikawa, Hidenori ^a   Otsuki, Akira ^a,c   Koide, Yasuo ^a   Oikawa, Tetsuo ^b   Murakami, Masanori ^a  

^a KYOTO UNIVERSITY   (Japan)

^b JEOL LTD   (Japan)

^c SUMITOMO ELECTRIC INDUSTRIES LTD   (Japan)

Author keywords

N type GaAs; NiGe; Ohmic contact

Indexed keywords

EID: 0000617416     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-996-0023-2     Document Type: Article

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