On the electrical deactivation of arsenic in silicon

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 15, Issue 3, 1997, Pages 757-759

  Myler, U ^a   Simpson, P J ^a   Lawther, D W ^b   Rousseau, P M ^c  

^a UNIVERSITY OF WESTERN ONTARIO   (Canada)

^b UNIVERSITY OF PRINCE EDWARD ISLAND   (Canada)

^c Stanford University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000575208     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589382     Document Type: Article

References (10)

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