Processing and Properties of (Mo,Cr) Oxycarbides from MOCVD

Applied Organometallic Chemistry

Volumn 12, Issue 3, 1998, Pages 201-220

  Wei, Wen Cheng J ^a   Lo, Ming Hung ^a,b  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^b Prosperity Dielectrics Co Ltd   (Taiwan)

Author keywords

Chromium oxycarbide; Coating; Kinetics; Microstructure; MOCVD; Molybdenum oxycarbide

Indexed keywords

EID: 0000565729     PISSN: 02682605     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1099-0739(199803)12:3<201::AID-AOC692>3.0.CO;2-T     Document Type: Article

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