Study of the composition of thin dielectrics grown on Si in a pure N 2O ambient

Applied Physics Letters

Volumn 59, Issue 12, 1991, Pages 1412-1414

  Chu, T Y ^a   Ting, W ^a   Ahn, J H ^a   Lin, S ^a   Kwong, D L ^a  

^a UNIVERSITY OF TEXAS AT AUSTIN   (United States)

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EID: 0000526980     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.105323     Document Type: Article

References (16)