Isoconcentration studies of antimony diffusion in silicon

Journal of Applied Physics

Volumn 81, Issue 5, 1997, Pages 2173-2178

  Nylandsted Larsen, A ^a   Kringhoj P ^a   Lundsgaard Hansen, J ^a   Shiryaev, S Yu ^a  

^a AARHUS UNIVERSITY   (Denmark)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000503654     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.364286     Document Type: Article

References (17)

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