Commercialization of SCALPEL masks

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 6, 1998, Pages 3582-3586

  Farrow, R C ^a   Novembre, A E ^a   Peabody, M ^a   Kasica, R ^a   Blakey, M ^a   Liddle, J A ^a   Werter, K ^a   DeMarco, R ^a   Ocola, L ^a   Rutberg, L ^a   Saunders, T ^a   Unruh, J ^b   Qian, F ^b   Smith, M ^c  

^a LUCENT TECHNOLOGIES   (United States)

^b PHOTRONICS INC   (United States)

^c DuPont Photomask   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000503270     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590310     Document Type: Article

References (10)

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