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Volumn 36, Issue 1-3, 1996, Pages 209-212
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The influences of carbon, hydrogen and nitrogen on the floating zone growth of four inch silicon crystals
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Author keywords
Carbon; Hydrogen; Nitrogen; Silicon
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Indexed keywords
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EID: 0000497801
PISSN: 09215107
EISSN: None
Source Type: Journal
DOI: 10.1016/0921-5107(95)01287-7 Document Type: Article |
Times cited : (14)
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References (5)
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