Forming of selected unimodal complex amplitude distributions by means of novel DOEs of MODAN-type

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3134, Issue , 1997, Pages 357-368

  Duparré, Michael R ^a   Pavelyev, Vladimir S ^b   Lüdge, Barbara ^a   Kley, Ernst Bernhard ^a   Kowarschik, Richard M ^a   Soifer, Victor A ^b  

^a FRIEDRICH SCHILLER UNIVERSITY JENA   (Germany)

^b Russian Academy   (Russian Federation)

Author keywords

Diffractive optical element; Electron beam direct writing; Intensity phase measurements; Iterative calculation; Unimodal distributions

Indexed keywords

DENSITY (OPTICAL); DIFFRACTIVE OPTICAL ELEMENTS; ELECTRONS; ENERGY EFFICIENCY; FORMING; FOURIER TRANSFORMS; FUSED SILICA; GAUSSIAN BEAMS; IMAGE SEGMENTATION; OPTICAL DEVICES; SILICA; TWO DIMENSIONAL;

2D PHASE DISTRIBUTION; CALCULATION PROCEDURE; COMPLEX AMPLITUDES; DIFFRACTIVE OPTICAL ELEMENT; ELECTRON DOSE; ELECTRON-BEAM DIRECT WRITING; FOURIER; GAUSSIAN; INTENSITY DISTRIBUTIONS; ITERATIVE CALCULATION; MODAL FUNCTIONS; PHASE DISTRIBUTIONS; PROJECTION OPERATORS; RESIST FILMS; RESIST PROFILE; SILICA SUBSTRATES; SURFACE PROFILING; TRANSMISSION MODES; UNIMODAL DISTRIBUTIONS;

INTEGRATED OPTOELECTRONICS;

EID: 0000476848     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.295137     Document Type: Conference Paper

References (8)

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