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Journal of Applied Physics

Volumn 70, Issue 9, 1991, Pages 4816-4822

Stresses in silicon substrates near isolation trenches

(3) Chidambarrao, D a Peng, J P a Srinivasan, G R a

a Semiconduct R and D Center (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000474978 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.349047 Document Type: Article

Times cited : (29)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.