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Physical Review Letters

Volumn 65, Issue 8, 1990, Pages 996-999

Abnormally low electron energy and heating-mode transition in a low-pressure argon rf discharge at 13.56 MHz

(2) Godyak, V A a Piejak, R B a

a VERIZON (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000468232 PISSN: 00319007 EISSN: None Source Type: Journal
DOI: 10.1103/PhysRevLett.65.996 Document Type: Article

Times cited : (512)

References (29)

1
- 84927443900
- V. A. Godyak, in Plasma-Surface Interactions and Processing of Materials, edited by O. Auciello, A. Gras-Marti, J. A. Valles-Abarca, and D. Flamm, NATO Advanced Study Institutes, Ser. E (Kluwer Academic, Dordrecht, 1990), Vol. 176, pp. 95–134.

2
- 0042918667
- (1988) Phys. Rev. A , vol.38 , pp. 2044
- Godyak, V.A.¹ Lagushenko, R.² Maya, J.³

3
- 0020114148
- (1982) J. Appl. Phys. , vol.53 , pp. 2939
- Kushner, M.J.¹

4
- 0023399836
- (1987) J. Phys. E , vol.20 , pp. 1046
- Braithwaite, N. St.¹ Benjamin, N.M.P.² Allen, J.E.³

5
- 0023384735
- and N.
- (1987) J. Phys. D , vol.20 , pp. 820
- Cox, T.I.¹ Deshmukh, V.G.I.² Hope, D.A.O.³ Hydes, A.J.⁴ Braithwaite, N. St.⁵ Benjamin, M.P.⁶

6
- 84957279418
- Measurements of time varying plasma potential, temperature, and density in a 13.56 MHz radio-frequency discharge
- (1989) Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films , vol.7 , pp. 972
- Wilson, J.L.¹ Caughman, J.B.O.² Nguyen³ Ruzic, D.N.⁴

7
- 84927443899
- (unpublished), Report J-5.
- Proceedings of the Forty-Second Annual Gaseous Electronics Conference, Palo Alto, California, 1989
- Terai, K.J.¹ Kaneda, T.² Chang, J.S.³

8
- 84927443898
- J. Appl. Phys. (to be published).
- Paranjpe, A.P.¹ Mc Vittie, J.P.² Self, S.A.³

9
- 5644262738
- (1972) Zh. Tekh. Fiz. , vol.41 , pp. 1364
- Godyak, V.A.¹

10
- 0001416615
- (1972) Sov. Phys. Tech. Phys. , vol.16 , pp. 1073

11
- 36549097289
- (1988) J. Appl. Phys. , vol.64 , pp. 4375
- Goedde, C.G.¹ Lichtenberg, A.J.² Lieberman, M.A.³

12
- 84936896312
- (1979) Zh. Tekh. Fiz. , vol.49 , pp. 2265
- Godyak, V.A.¹ Oks, S.N.²

13
- 3943091586
- (1979) Sov. Phys. Tech. Phys. , vol.24 , pp. 1255

14
- 34249741364
- (1985) Fiz. Plazmy , vol.11 , pp. 618
- Ershov, A.P.¹ Kuzovnikov, A.A.²

15
- 84891325268
- (1985) Sov. J. Plasma Phys. , vol.11 , pp. 361

16

17
- 0000226376
- (1990) Appl. Phys. Lett. , vol.56 , pp. 1022
- Surrendra, M.K.¹ Graves, D.B.² Morey, I.J.³

18
- 4143066259
- (1989) Phys. Rev. Lett. , vol.63 , pp. 2361
- Sommerer, T.J.¹ Hitchon, W.N.G.² Lawler, J.F.³

19
- 84956125739
- The influence of the electron transport cross sectional shape on electron energy distribution functions in DC and microwave plasmas
- (1988) Journal of Physics D: Applied Physics , vol.21 , pp. 411
- Karoulina, E.V.¹ Lebedev, Yu. A.²

20
- 5244256260
- (1951) Phys. Rev. , vol.84 , pp. 519
- Allis, W.P.¹ Brown, S.C.² Everhart, E.³

21
- 10044238317
- (1979) Fiz. Plazmy , vol.5 , pp. 670
- Godyak, V.A.¹ Ganna, A. Kh.² Khanneh, A.S.³

22
- 0018464264
- (1979) Sov. J. Plasma Phys. , vol.5 , pp. 376

23
- 49449102394
- (1976) Fiz. Plazmy , vol.2 , pp. 141
- Godyak, V.A.¹

24
- 5344246232
- (1976) Sov. J. Plasma Phys. , vol.2 , pp. 78

25
- 33847072441
- (1964) Phys. Rev. , vol.136 , pp. A1538
- Frost, L.S.¹ Phelps, A.V.²

26
- 0024092852
- (1988) J. Phys. D , vol.21 , pp. 1496
- Ingram, S.G.¹ Braithwaite, N. St.²

27
- 0022703125
- Ion Bombardment Secondaty Electron Maintenance of Steady RF Discharge
- (1986) IEEE Transactions on Plasma Science , vol.14 , pp. 112
- Godyak, V.A.¹ Khanneh, A.S.²

28
- 0043100946
- (1988) J. Appl. Phys. , vol.63 , pp. 2226
- Hebner, G.A.¹ Verdeyen, J.T.² Kushner, M.J.³

29
- 3743048919
- (1988) Appl. Phys. Lett. , vol.52 , pp. 783
- Anderson, C.A.¹ Graham, W.G.² Hopkins, M.B.³

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