Hot-electron-induced quasibreakdown of thin gate oxides

Journal of Applied Physics

Volumn 82, Issue 1, 1997, Pages 297-302

  Umeda, Kazunori ^a,b   Taniguchi, Kenji ^a  

^a OSAKA UNIVERSITY   (Japan)

^b HITACHI LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000451121     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.365812     Document Type: Article

References (17)

1. P. Olivo, T. Nguyen, and B. Ricco, IEEE Trans. Electron Devices ED-35, 2259 (1988).
2. K. Okada, S. Kawasaki, and Y. Horofuji, Extended Abstracts of the 1994 International Conference on Solid State Devices and Materials, Yokohama, p. 565, 1994.
3. K. Okada and S. Kawasaki, Extended Abstracts of the 1995 International Conference on Solid State Devices and Materials, Osaka, p. 473, 1995.
4. T. Yoshida, S. Miyazaki, and M. Hirose, Extended Abstracts of the 1996 International Conference on Solid State Devices and Materials. Yokohama, p. 565, 1996.
5. S. Lee, B. Cho, J. Kim, and S. Choi, IEDM Tech. Dig. 605 (1994).
6. P. E. Cottrell, R. R. Troutman, and T. H. Ning. IEEE Trans. Electron Devices ED-26, 520 (1979).
7. T. H. Ning, Solid-State Electron. 21, 273 (1978).
8. T. Kunikiyo, M. Takenaka, Y. Kamakura, M. Yamaji, H. Mizuno, M. Morifuji, K. Taniguchi, and C. Hamaguchi, J. Appl. Phys. 75, 297 (1994).
9. R. H. Fowler and L. T. Nordheim, Proc. R. Soc. London A119, 173 (1928).
10. M. Lenzlinger and E. H. Snow. J. Appl. Phys. 40, 278 (1969).
11. J. L. Alay, M. Fukuda, K. Nakagawa, S. Yokoyama, and M. Hirose, Extended Abstracts of the 1995 International Conference on Solid State Devices and Materials, p. 28, 1995.
12. R. G. Mazur and D. H. Hickey, J. Electrochem. Soc. 113, 215 (1966).
13. M. V. Fischetti and S. E. Laux, Phys. Rev. B 38. 9721 (1988).
14. T. Toyabe and H. Kodera, Jpn. J. Appl. Phys. 1 13, 1404 (1974).
15. D. J. DiMaria, T. N. Theis, J. R. Kirtley, F. L. Pesavento, D. W. Dong, and S. D. Brorson, J. Appl. Phys. 57, 1214 (1985).
16. D. J. DiMaria, M. V. Fischetti, M. Arienzo, and E. Tierney, J. Appl. Phys. 60, 1719 (1986).
17. H. Mizuno (private communication).