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Journal of Applied Physics

Volumn 79, Issue 5, 1996, Pages 2352-2363

Species and dose dependence of ion implantation damage induced transient enhanced diffusion

(4) Chao, H S a Crowder, S W a Griffin, P B a Plummer, J D a

a STANFORD UNIVERSITY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000398591 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.361162 Document Type: Article

Times cited : (72)

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