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Volumn 88, Issue 5, 2000, Pages 2363-2370
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Predicted thermally induced stresses in, and the bow of, a circular substrate/thin-film structure
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Author keywords
[No Author keywords available]
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Indexed keywords
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EID: 0000396264
PISSN: 00218979
EISSN: None
Source Type: Journal
DOI: 10.1063/1.1286096 Document Type: Article |
Times cited : (47)
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References (13)
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