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Volumn 80, Issue 10, 1996, Pages 5704-5712

Effect of vapor composition on polytype homogeneity of epitaxial silicon carbide

Author keywords

[No Author keywords available]

Indexed keywords


EID: 0000392094     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.363622     Document Type: Review
Times cited : (41)

References (31)
  • 10
    • 85033000032 scopus 로고    scopus 로고
    • note
    • Cree Research, Inc. Durham, NC 27713.
  • 19
    • 6144258655 scopus 로고
    • Amorphous and Crystalline Silicon Carbide III
    • edited by G. L. Harris, M. G. Spencer, and C. Y. Yang, Springer, Berlin
    • J. A. Powell, J. B. Petit, L. G. Matus, and S. E. Lempner, Amorphous and Crystalline Silicon Carbide III, edited by G. L. Harris, M. G. Spencer, and C. Y. Yang, Springer Proceedings in Physics, Vol. 56 (Springer, Berlin, 1992), p. 313.
    • (1992) Springer Proceedings in Physics , vol.56 , pp. 313
    • Powell, J.A.1    Petit, J.B.2    Matus, L.G.3    Lempner, S.E.4
  • 22
    • 0016377521 scopus 로고
    • edited by C. H. L. Goodman Plenum, New York
    • E. Kaldis, in Crystal Growth, Theory and Techniques, edited by C. H. L. Goodman (Plenum, New York, 1974), Vol. 1, p. 49.
    • (1974) Crystal Growth, Theory and Techniques , vol.1 , pp. 49
    • Kaldis, E.1
  • 26
    • 6144290208 scopus 로고
    • Amorphous and Crystalline Silicon Carbide II, edited by M. M. Rahman, C. Y. Yang and G. L. Harris Springer, Berlin
    • H. Matsunami, M. Nakayama, T. Yoshinobu, H. Shiomi, and T. Fuyuki, in Amorphous and Crystalline Silicon Carbide II, Springer Proceedings in Physics, Vol. 43, edited by M. M. Rahman, C. Y. Yang and G. L. Harris (Springer, Berlin, 1989), p. 157.
    • (1989) Springer Proceedings in Physics , vol.43 , pp. 157
    • Matsunami, H.1    Nakayama, M.2    Yoshinobu, T.3    Shiomi, H.4    Fuyuki, T.5
  • 28
    • 85033024282 scopus 로고    scopus 로고
    • J. A. Powell and L. G. Matus, in Ref. 26, p. 14
    • J. A. Powell and L. G. Matus, in Ref. 26, p. 14.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.