Spatial distribution of Cu sputter ejected by very low energy ion bombardment

Journal of Applied Physics

Volumn 82, Issue 4, 1997, Pages 1868-1875

  Doughty, C ^a,b   Gorbatkin, S M ^a   Berry, L A ^a  

^a OAK RIDGE NATIONAL LABORATORY   (United States)

^b PlasmaQuest Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000382005     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.365991     Document Type: Article

References (25)

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