Investigation of the precursors of a-Si:H films produced by decomposition of silane on hot tungsten surfaces

Journal of Non-Crystalline Solids

Volumn 137-138, Issue PART 2, 1991, Pages 661-664

  Horbach, C ^a   Beyer, W ^a   Wagner, H ^a  

^a FORSCHUNGSZENTRUM JÜLICH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000379426     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-3093(05)80207-8     Document Type: Article

References (7)

1. Study on catalytic chemical vapor deposition method to prepare hydrogenated amorphous silicon
2. Hydrogen incorporation in amorphous silicon and processes of its release