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Thin Solid Films

Volumn 411, Issue 2, 2002, Pages 289-297

Nano structure analysis of sputtered thin films consisting of cobalt oxide and soda-lime glass composite

(4) Yamamoto, Hiroki a Naito, Takashi a Terao, Motoyasu a Shintani, Toshimichi a

a HITACHI LTD (Japan)

Author keywords

Cobalt oxide; Nanostructures; Sputtering; Transmission electron microscopy

Indexed keywords

COMPOSITE MATERIALS; ENERGY DISPERSIVE SPECTROSCOPY; MAGNETRON SPUTTERING; NANOSTRUCTURED MATERIALS; OPTICAL RESOLVING POWER; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

COBALT OXIDE; LAMELLAR STRUCTRUES; NANOSTRUCTURES; SODA LIME GLASS;

THIN FILMS;

EID: 0000377906 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(02)00275-4 Document Type: Article

Times cited : (14)

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