Adsorption of tri-methyl aluminum molecules on silicon

Surface Science

Volumn 198, Issue 3, 1988, Pages 461-472

  Salaneck, W R ^a   Bergman, R ^a   Sundgren, J E ^a   Rockett, A ^b   Motooka, T ^b   Greene, J E ^b  

^a LINKÖPING UNIVERSITY   (Sweden)

^b UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000371508     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/0039-6028(88)90378-0     Document Type: Article

References (25)

1. Photodeposition of metal films with ultraviolet laser light
2. Vapor Phase Deposition of Aluminum Film on Quartz Substrate
3. Mechanisms of Al film growth by ultraviolet laser photolysis of trimethylaluminum
4. Photoelectron Spectroscopy of the Adsorption of Amino Acids on Surfaces: Glycine on Si(O2)