Three-dimensional optical metrology with color-coded extended depth of focus

Optics Letters

Volumn 24, Issue 7, 1999, Pages 439-441

  Hasman, E ^a   Keren, S ^b   Davidson, N ^b   Friesem, A A ^b  

^a TECHNION ISRAEL INSTITUTE OF TECHNOLOGY   (Israel)

^b WEIZMANN INSTITUTE OF SCIENCE   (Israel)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000371436     PISSN: 01469592     EISSN: None     Source Type: Journal    
DOI: 10.1364/OL.24.000439     Document Type: Article

References (8)

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3. P. Seitz, Opt. Eng. 27, 535 (1988).
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5. G. Bickel, G. Häusler, and M. Maul, Opt. Eng. 24, 975 (1985).
6. N. Davidson, A. A. Friesem, and E. Hasman, Opt. Lett. 16, 523 (1991).
7. E. Hasman, N. Davidson, and A. A. Friesem, Opt. Lett. 16, 423 (1991).
8. We calculated the intensity of each wavelength by multiplying a Fresnel diffraction integral by the VWF response and taking into account the dispersion relation of the ADO. The total intensity was obtained by integration of those intensities over the entire spectrum of the source.