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Volumn 38, Issue 2, 2000, Pages 129-152

Simulation of rapid thermal processing in a distributed computing environment

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EID: 0000368294     PISSN: 10407782     EISSN: 15210634     Source Type: Journal    
DOI: 10.1080/10407780050135379     Document Type: Article
Times cited : (10)

References (17)
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  • 3
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    • K. L. Knutson, S. A. Campbell, and F. Dunn, Modeling of Three Dimensional Effects on Thermal Uniformity in Rapid Thermal Processing of 8 Inch Wafers, IEEE Trans. Semicon. Manuf., vol. 7, pp. 68-72, 1994.
    • (1994) IEEE Trans. Semicon. Manuf. , vol.7 , pp. 68-72
    • Knutson, K.L.1    Campbell, S.A.2    Dunn, F.3
  • 5
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    • Transient effects in rapid thermal processing
    • S. A. Campbell and K. L. Knutson, Transient Effects in Rapid Thermal Processing, IEEE Trans. Semicon. Manuf., vol. 5, pp. 302-307, 1992.
    • (1992) IEEE Trans. Semicon. Manuf. , vol.5 , pp. 302-307
    • Campbell, S.A.1    Knutson, K.L.2
  • 6
    • 0026963681 scopus 로고
    • Mathematical modeling of a single-wafer rapid thermal reactor
    • S. Chatterjee, I. Trachtenberg, and T. F. Edgar, Mathematical Modeling of a Single-Wafer Rapid Thermal Reactor, J. Electrochem. Soc., vol. 139, pp. 3682-3689, 1992.
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  • 8
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    • Prediction of surface radiative heat transfer using the modihed discrete transfer method
    • submitted
    • J. Liu and Y. S. Chen, Prediction of Surface Radiative Heat Transfer Using the Modihed Discrete Transfer Method, Numerical Heat Transfer, Part B, submitted.
    • Numerical Heat Transfer
    • Liu, J.1    Chen, Y.S.2
  • 11
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  • 13
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    • Gmres: A generalized minimal residual algorithm for solving nonsymmetric linear systems
    • Y. Saad and M. H. Schultz, GMRES: A Generalized Minimal Residual Algorithm for Solving Nonsymmetric Linear Systems, SIAM J. Sci. Statist. Comput. vol. 7, no. 3, pp. 856-869, 1986.
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    • Parallel simulation of radiative heat transfer using an unstructured finite-volume method
    • J. Liu, H. M. Shang, and Y. S. Chen, Parallel Simulation of Radiative Heat Transfer Using an Unstructured Finite-Volume Method, Numerical Heat Transfer, Part B, vol. 36, pp. 115-137, 1999.
    • (1999) Numerical Heat Transfer , vol.36 , pp. 115-137
    • Liu, J.1    Shang, H.M.2    Chen, Y.S.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.