Analysis of KOH etching of (100) silicon on insulator for the fabrication of nanoscale tips

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 5, 1998, Pages 2844-2848

  Yun, M H ^a   Burrows, V A ^a   Kozicki, M N ^a  

^a ARIZONA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000363348     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590282     Document Type: Article

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