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Volumn 7, Issue 4, 2001, Pages 157-166

Effects of residence time and reaction conditions on the deposition of silica, alumina, and aluminosilicates from CH3SiCl3, AlCl3, CO2, and H2 mixtures

(2) Sotirchos, Stratis V a,b Nitodas, Stephanos F b

a INSTITUTE OF CHEMICAL ENGINEERING SCIENCES (Greece)

b University of Rochester (United States)

Author keywords

Alumina; Aluminosilicates; Mullite; Reaction conditions; Residence time; Silica

Indexed keywords

EID: 0000357330 PISSN: 09481907 EISSN: None Source Type: Journal
DOI: 10.1002/1521-3862(200107)7:4<157::AID-CVDE157>3.0.CO;2-P Document Type: Article

Times cited : (6)

References (36)

1
- 84979956641
- I. A. Aksay, D. M. Dabbs, M. Sarikaya, J. Am. Ceram. Soc. 1991, 74, 2343.
- (1991) J. Am. Ceram. Soc. , vol.74 , pp. 2343
- Aksay, I.A.¹ Dabbs, D.M.² Sarikaya, M.³

2
- 0001442504
- S. Somiya, Y. Hirata, Am. Ceram. Soc. Bull. 1991, 70, 1624.
- (1991) Am. Ceram. Soc. Bull. , vol.70 , pp. 1624
- Somiya, S.¹ Hirata, Y.²

3
- 84957485329
- S. Musikant, Proc. SPIE-Int. Soc. Opt. Eng. 1981, 297, 2.
- (1981) Proc. SPIE-Int. Soc. Opt. Eng. , vol.297 , pp. 2
- Musikant, S.¹

4
- 9344263196
- R. L. Gentilman, Proc. SPIE - Int. Soc. Opt. Eng. 1986, 683, 2.
- (1986) Proc. SPIE - Int. Soc. Opt. Eng. , vol.683 , pp. 2
- Gentilman, R.L.¹

5
- 0004408907
- Eds: S. Somiya, R. F. Davis, J. A. Pask, American Ceramic Society, Westerville, OH
- S. Kanzaki, M. Ohashi, H. Tabana, T. Kurihara, S.-I. Iwai, S.-I. Wakabayashi, in Ceramic Transactions (Eds: S. Somiya, R. F. Davis, J. A. Pask), American Ceramic Society, Westerville, OH 1990, Vol. 6, p. 389.
- (1990) Ceramic Transactions , vol.6 , pp. 389
- Kanzaki, S.¹ Ohashi, M.² Tabana, H.³ Kurihara, T.⁴ Iwai, S.-I.⁵ Wakabayashi, S.-I.⁶

6
- 0001404134
- Eds: K. M. Nair, R. C. Pohanka, R. C. Buchanan, American Ceramic Society, Westerville, OH
- E. A. Giess, J. M. Roldan, P. J. Bailey, E. Goo, in Ceramic Transactions (Eds: K. M. Nair, R. C. Pohanka, R. C. Buchanan), American Ceramic Society, Westerville, OH 1990, Vol. 15, p. 167.
- (1990) Ceramic Transactions , vol.15 , pp. 167
- Giess, E.A.¹ Roldan, J.M.² Bailey, P.J.³ Goo, E.⁴

7
- 0027560883
- F. Kara, J. A. Little, J. Mater. Sci. 1993, 28, 1323.
- (1993) J. Mater. Sci. , vol.28 , pp. 1323
- Kara, F.¹ Little, J.A.²

8
- 0000838062
- Eds: S. Somiya, R. F. Davis, J. A. Pask, American Ceramic Society, Westerville, OH
- S. Hori, R. Kurita, in Ceramic Transactions (Eds: S. Somiya, R. F. Davis, J. A. Pask), American Ceramic Society, Westerville, OH 1990, Vol. 6, p. 311.
- (1990) Ceramic Transactions , vol.6 , pp. 311
- Hori, S.¹ Kurita, R.²

9
- 0004429190
- Eds: G. L. Messing, S. Hirano, H. Hauser, American Ceramic Society, Westerville, OH
- S. L. Chung, Y. C. Shu, M. S. Tsai, in Ceramic Transactions (Eds: G. L. Messing, S. Hirano, H. Hauser), American Ceramic Society, Westerville, OH 1990, Vol. 12, p. 275.
- (1990) Ceramic Transactions , vol.12 , pp. 275
- Chung, S.L.¹ Shu, Y.C.² Tsai, M.S.³

10
- 0029274693
- K. Itatani, T. Kuhozono, F. S. Howell, A. Kishioka, M. Kinoshita, J. Mater. Sci. 1995, 30, 1158.
- (1995) J. Mater. Sci. , vol.30 , pp. 1158
- Itatani, K.¹ Kuhozono, T.² Howell, F.S.³ Kishioka, A.⁴ Kinoshita, M.⁵

11
- 0029275633
- K. Itatani, T. Kubozono, F. S. Howell, A. Kishioka, M. Kinoshita, J. Mater. Sci. 1995, 30, 1196.
- (1995) J. Mater. Sci. , vol.30 , pp. 1196
- Itatani, K.¹ Kubozono, T.² Howell, F.S.³ Kishioka, A.⁴ Kinoshita, M.⁵

12
- 0031248419
- M. L. Auger, V. K. Sarin, Surf. Coat. Technol. 1997, 94-95, 46.
- (1997) Surf. Coat. Technol. , vol.94-95 , pp. 46
- Auger, M.L.¹ Sarin, V.K.²

13
- 0033882507
- J. A. Haynes, M. J. Lance, M. K. Ferber, K. M. Cooley, R. A. Lowden, D. P. Stinton, J. Am. Ceram. Soc. 2000, 83, 657.
- (2000) J. Am. Ceram. Soc. , vol.83 , pp. 657
- Haynes, J.A.¹ Lance, M.J.² Ferber, M.K.³ Cooley, K.M.⁴ Lowden, R.A.⁵ Stinton, D.P.⁶

14
- 0033342632
- J. A. Haynes, K. M. Cooley, D. P. Stinton, R. A. Lowden, W. Y. Lee, Ceram. Eng. Sci. Proc. 1999, 20, 355.
- (1999) Ceram. Eng. Sci. Proc. , vol.20 , pp. 355
- Haynes, J.A.¹ Cooley, K.M.² Stinton, D.P.³ Lowden, R.A.⁴ Lee, W.Y.⁵

15
- 0026929255
- A. R. D. G. Conde, M. Puerta., H. Ruiz, J. L. Olivares, J. Non-Cryst. Solids 1992, 147, 467.
- (1992) J. Non-cryst. Solids , vol.147 , pp. 467
- Conde, A.R.D.G.¹ Puerta, M.² Ruiz, H.³ Olivares, J.L.⁴

16
- 0026931945
- P. Colomban, V. Vendange, J. Non-Cryst. Solids 1992, 147, 245.
- (1992) J. Non-cryst. Solids , vol.147 , pp. 245
- Colomban, P.¹ Vendange, V.²

17
- 0000717397
- S. F. Nitodas, S. V. Sotirchos, Chem. Vap. Deposition 1999, 5, 219.
- (1999) Chem. Vap. Deposition , vol.5 , pp. 219
- Nitodas, S.F.¹ Sotirchos, S.V.²

18
- 0030164059
- R. P. Mulpuri, V. K. Sarin, J. Mater. Res. 1996, 11, 1315.
- (1996) J. Mater. Res. , vol.11 , pp. 1315
- Mulpuri, R.P.¹ Sarin, V.K.²

19
- 0033879744
- S. F. Nitodas, S. V. Sotirchos, J. Electrochem. Soc. 2000, 147, 1050.
- (2000) J. Electrochem. Soc. , vol.147 , pp. 1050
- Nitodas, S.F.¹ Sotirchos, S.V.²

20
- 0000886487
- E. Fredriksson, J.-O. J. Carlsson, Chem. Vap. Deposition 1993, 1, 333.
- (1993) Chem. Vap. Deposition , vol.1 , pp. 333
- Fredriksson, E.¹ Carlsson, J.-O.J.²

21
- 0016917681
- R. Funk, H. Schachner, C. Triquet, M. Kornmann, B. Lux, J. Electrochem. Soc. 1976, 123, 285.
- (1976) J. Electrochem. Soc. , vol.123 , pp. 285
- Funk, R.¹ Schachner, H.² Triquet, C.³ Kornmann, M.⁴ Lux, B.⁵

22
- 0017983157
- V. J. Silvestri, C. M. Osburn, D. W. Ormond, J. Electrochem. Soc. 1978, 725, 902.
- (1978) J. Electrochem. Soc. , vol.725 , pp. 902
- Silvestri, V.J.¹ Osburn, C.M.² Ormond, D.W.³

23
- 0020475746
- J. G. Kim, C. S. Park, J. S. Chun, Thin Solid Films 1982, 97, 97.
- (1982) Thin Solid Films , vol.97 , pp. 97
- Kim, J.G.¹ Park, C.S.² Chun, J.S.³

24
- 0020165685
- R. Colmet, R. Naslain, Wear 1982, 80, 221.
- (1982) Wear , vol.80 , pp. 221
- Colmet, R.¹ Naslain, R.²

25
- 0032116377
- Y. W. Bae, W. Y. Lee, T. M. Besmann, O. B. Cavin, T. R. Watkins, J. Am. Ceram. Soc. 1998, 81, 1945.
- (1998) J. Am. Ceram. Soc. , vol.81 , pp. 1945
- Bae, Y.W.¹ Lee, W.Y.² Besmann, T.M.³ Cavin, O.B.⁴ Watkins, T.R.⁵

26
- 0014872798
- P. Wong, McD. Robinson, J. Am. Ceram. Soc. 1970, 53, 617.
- (1970) J. Am. Ceram. Soc. , vol.53 , pp. 617
- Wong, P.¹ Robinson, McD.²

27
- 0026879982
- M. Tsapatsis, G. R. Gavalas, AIChE J. 1992, 38, 847.
- (1992) AIChE J. , vol.38 , pp. 847
- Tsapatsis, M.¹ Gavalas, G.R.²

28
- 0029210179
- S. Kim, G. R. Gavalas, Ind. Eng. Chem. Res. 1995, 34, 168.
- (1995) Ind. Eng. Chem. Res. , vol.34 , pp. 168
- Kim, S.¹ Gavalas, G.R.²

29
- 0028761995
- S. M. George, O. Sneh, A. C. Dillon, M. L. Wise, A. W. Ott, L. A. Okada, J. D. Way, Appl. Surf. Sci. 1994, 82/83, 460.
- (1994) Appl. Surf. Sci. , vol.82-83 , pp. 460
- George, S.M.¹ Sneh, O.² Dillon, A.C.³ Wise, M.L.⁴ Ott, A.W.⁵ Okada, L.A.⁶ Way, J.D.⁷

30
- 0000240843
- G. L. Tingey, J. Phys. Chem. 1966, 70, 1406.
- (1966) J. Phys. Chem. , vol.70 , pp. 1406
- Tingey, G.L.¹

31
- 0023311352
- S. W. Choi, C. Kim, J. G. Kim, J. S. Chun, J. Mater. Sci. 1987, 22, 1051.
- (1987) J. Mater. Sci. , vol.22 , pp. 1051
- Choi, S.W.¹ Kim, C.² Kim, J.G.³ Chun, J.S.⁴

32
- 0020834784
- C. S. Park, J. G. Kim, J. S. Chun, J. Vac. Sci. Technol. A 1983, 1, 1820.
- (1983) J. Vac. Sci. Technol. A , vol.1 , pp. 1820
- Park, C.S.¹ Kim, J.G.² Chun, J.S.³

33
- 0004448412
- Eds: K. V. Logan, Z. A. Munir, American Ceramic Society, Westerville, OH
- S. V. Sotirchos, I. M. Kostjuhin, in Ceramic Transactions (Eds: K. V. Logan, Z. A. Munir), American Ceramic Society, Westerville, OH 1996, Vol. 79, p. 27.
- (1996) Ceramic Transactions , vol.79 , pp. 27
- Sotirchos, S.V.¹ Kostjuhin, I.M.²

34
- 0004405438
- Eds: M. D. Allendorf, C. Bernard, Electrochem. Soc. Proc., The Electrochemical Society, Pennington, NJ
- S. V. Sotirchos, I. M. Kostjuhin, in Proc. 14th Int. Conf. on CVD and EUROCVD-11 (Eds: M. D. Allendorf, C. Bernard), Electrochem. Soc. Proc., Vol. 97-25, The Electrochemical Society, Pennington, NJ 1997, p. 512.
- (1997) Proc. 14th Int. Conf. on CVD and EUROCVD-11 , vol.97 , Issue.25 , pp. 512
- Sotirchos, S.V.¹ Kostjuhin, I.M.²

35
- 0032206287
- G. D. Papasouliotis, S. V. Sotirchos, J. Electrochem. Soc. 1998, 145, 3908.
- (1998) J. Electrochem. Soc. , vol.145 , pp. 3908
- Papasouliotis, G.D.¹ Sotirchos, S.V.²

36
- 0032646392
- G. D. Papasouliotis, S. V. Sotirchos, J. Mater. Res. 1999, 14, 3397.
- (1999) J. Mater. Res. , vol.14 , pp. 3397
- Papasouliotis, G.D.¹ Sotirchos, S.V.²

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