Growth and characterization of aluminum oxide thin films for evaluation as reference materials

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 15, Issue 3, 1997, Pages 470-477

  Gaarenstroom, Stephen W ^a  

^a GENERAL MOTORS CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000345439     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580876     Document Type: Article

References (15)

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