New ripple patterns observed in excimer-laser irradiated SiO2/polycrystalline silicon/SiO2 structures

Applied Physics Letters

Volumn 70, Issue 26, 1997, Pages 3552-3554

  Giust, G K ^a   Sigmon, T W ^a,b  

^a Arizona State University   (United States)

^b LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000344047     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.119230     Document Type: Article

References (6)

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6. G. K. Giust and T. W. Sigmon, J. Electron. Mater. (to be published).