Effect on thermal stability of a Cu/Ta/Si heterostructure of the incorporatio of cerium oxide into the Ta barrier

Journal of Applied Physics

Volumn 83, Issue 12, 1998, Pages 8074-8076

  Yoon, Dong Soo ^a   Baik, Hong Koo ^a   Lee, Sung Man ^b  

^a Yonsei University   (South Korea)

^b Kangwon National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000334820     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.367904     Document Type: Article

References (11)

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