Friction forces on hydrogen passivated (110) silicon and silicon dioxide studied by scanning force microscopy

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 2, 1996, Pages 1255-1258

  Scandella, L ^a   Meyer, E ^b   Howald, L ^b   Luthi R ^b   Guggisberg, M ^b   Gobrecht, J ^a   Guntherodt H J ^b  

^a PAUL SCHERRER INSTITUTE   (Switzerland)

^b UNIVERSITY OF BASEL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000312919     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.588526     Document Type: Article

References (19)

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