A Conservative Finite Difference Method for the Numerical Solution of Plasma Fluid Equations

Journal of Computational Physics

Volumn 149, Issue 1, 1999, Pages 168-193

  Colella, Phillip ^a   Dorr, Milo R ^b   Wake, Daniel D ^b  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

^b LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

Author keywords

Finite difference methods; Ionized gas flow in electromagnetic fields; Models; Numerical methods; Plasmic flow

Indexed keywords

BOUNDARY LAYERS; DIELECTRIC RELAXATION; DIFFUSION IN LIQUIDS; ELECTRIC FIELDS; ELECTROMAGNETIC FIELDS; FINITE DIFFERENCE METHOD; FLOW OF GASES; IONIZATION OF GASES; POISSON EQUATION;

FINITE-DIFFERENCE METHODS; FLUID EQUATIONS; FLUID MODELING; ION SPECIES; IONIZED GAS; IONIZED GAS FLOW IN ELECTROMAGNETIC FIELD; LOW PRESSURE PLASMA; NUMERICAL SOLUTION; PLASMA FLUIDS; PLASMIC FLOW;

NUMERICAL METHODS;

EID: 0000308585     PISSN: 00219991     EISSN: None     Source Type: Journal    
DOI: 10.1006/jcph.1998.6136     Document Type: Article

References (17)

1. M. S. Barnes, T. J. Colter, and E. Elta, Large-signal time-domain modeling of low-pressure RF glow discharges, J. Appl. Phys. 61, 81 (1987).
2. F. F. Chen, Introduction to Plasma Physics and Controlled Fusion (Plenum, New York, 1984).
3. P. Colella, Multidimensional upwind methods for hyperbolic conservation laws, J. Comput. Phys. 87, 171 (1990).
4. P. Colella, M. R. Dorr, and D. D. Wake, Numerical Solution of Plasma Fluid Equations Using Locally Refined Grids, Technical Report UCRL-JC-129913, Lawrence Livermore National Laboratory, Livermore, California, March 1998. [J. Comput. Phys., submitted]
5. P. Colella and E. G. Puckett, Modern Numerical Methods for Fluid Flow (Cambridge Univ. Press, Cambridge), in preparation.
6. G. Dahlquist and A. Bjorck, Numerical Methods (Prentice-Hall, Englewood Cliffs, NJ, 1974).
7. L. R. Peterson and J. E. Allen, Jr., Argon elastic scattering and ionization rates, J. Chem. Phys. 56(12), 6068 (1972).
8. V. E. Golant, A. P. Zhilinsky, and I. E. Sakharov, Fundamentals of Plasma Physics (Wiley, New York, 1980).
9. S. Hashiguchi, Implicit difference scheme to calculate electric fields, Japan. J. Appl. Phys. 32(1A/B, 15), L138 (1993).
10. R. J. LeVeque, Numerical Methods for Conservation Laws (Birkhauser, Basel, 1992).
11. M. A. Lieberman and A. J. Lichtenberg, Principles of Plasma Discharges and Materials Processing (Wiley, New York, 1994).
12. D. M. Manos and D. L. Flamm, Plasma Etching: An Introduction (Academic Press, San Diego, 1989).
13. R. A. Stewart, P. Vitello, and D. B. Graves, Two-dimensional fluid model of high density inductively coupled plasma sources, J. Vacuum Sci. Technol. B 12 (1994).
14. G. Strang, On the construction and comparison of difference schemes, SIAM J. Numer. Anal. 5, 506 (1968).
15. N. Tishchenko, personal communication.
16. P. Vitello, personal communication.
17. D. D. Wake, Simulation of Plasma Based Semiconductor Manufacturing Using Block Structured Locally Refined Grids, Ph.D. thesis, University of California, Davis, 1998.