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Journal of Applied Physics

Volumn 65, Issue 2, 1989, Pages 629-635

Compositional study of ultrathin rapidly reoxidized nitrided oxides

(6) Hori, Takashi a Iwasaki, Hiroshi a Ohmura, Takuichi b Samizo, Atsuko b Sato, Minoru b Yoshioka, Yoshiaki b

a PANASONIC CORPORATION (Japan)

b Matsushita Technoresearch Inc (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000296746 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.343095 Document Type: Article

Times cited : (48)

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