High rate deposition of diamond-like carbon films by sheet-like plasma chemical vapor deposition

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 17, Issue 3, 1999, Pages 731-734

  Nonogaki, Ryozo ^a   Yamada, Suzuya ^a   Araki, Tsutomu ^a   Wada, Tetsuya ^a  

^a DENKA COMPANY LIMITED   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000286809     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581693     Document Type: Article

References (7)

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