Ultra-precision grinding of chemically vapor deposited silicon carbide mirrors for synchrotron radiation

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2856, Issue , 1996, Pages 323-330

  Namba, Yoshiharu ^a  

^a CHUBU UNIVERSITY   (Japan)

Author keywords

Atomic force microscope; Chemical vapor deposited silicon carbide; Dressing; Ductile mode grinding; Reflectivity; Resinoid bonded diamond wheel; Surface roughness; Ultra precision surface grinder; X ray mirror

Indexed keywords

ATOMIC FORCE MICROSCOPY; CHEMICAL VAPOR DEPOSITION; GLASS CERAMICS; GRINDING (MACHINING); GRINDING MACHINES; GRINDING WHEELS; LUMINANCE; MIRRORS; REFLECTION; RESINS; SILICON CARBIDE; SYNCHROTRON RADIATION; SYNCHROTRONS; THERMAL EXPANSION; WHEEL DRESSING; WHEELS; X RAYS;

CHEMICAL VAPOR DEPOSITED SILICON CARBIDE; DIAMOND WHEEL; DUCTILE MODE GRINDING; ULTRA PRECISION; X RAY MIRRORS;

SURFACE ROUGHNESS;

EID: 0000280969     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.259864     Document Type: Conference Paper

References (11)

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