Detection and sizing of participate contamination in rigid disk drives: Instruments and sampling techniques

IEEE Transactions on Magnetics

Volumn 35, Issue 2 PART 1, 1999, Pages 956-962

  Bhushan, Bharat ^a,b   Chandra, Sumit ^b  

^a IEEE   (United States)

^b The Ohio State University   (United States)

Author keywords

Aerosol sampling; Clean room monitoring; Particulate contamination; Rigid disk

Indexed keywords

EID: 0000280896     PISSN: 00189464     EISSN: None     Source Type: Journal    
DOI: 10.1109/20.753815     Document Type: Article

References (9)

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3. R. W. McIlvaine, "Cleanroom demands for the next generation", Semiconductor International, pp 65-70, March, 1998.
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5. R. Koka and A. R. Kumaran, "Visualization and analysis of particulate buildup on the leading edge tapers of sliders", Adv. Info. Storage Syst., vol. 2, pp 161-171, 1991.
6. B. Bhushan, Tribology and Mechanics of Magnetic Storage Devices, 2nd ed., Springer-Verlag New York, New York, 1996.
7. B. Hiller, "Contaminant Particles: The Microtribology Approach", in Handbook of Micro/nano Tribology, (B.Bhushan, ed.), pp. 505-557,CRC Press, 1995.
8. R. Nagarajan, "Surface properties and Cleanability: A Rational Correlation", Journal of the IES, pp 26-33, January/February 1990.
9. Deposition software, version 3.01, Mechanical Engineering Department, Texas A&M University, 1992.