Thickness dependence of room temperature permittivity of polycrystalline BaTiO3 thin films by radio-frequency magnetron sputtering

Journal of Applied Physics

Volumn 81, Issue 9, 1997, Pages 6322-6327

  Jang, Jin Wook ^a   Chung, Su Jin ^a   Cho, Woon Jo ^b   Hahn, Taek Sang ^b   Choi, Sang Sam ^b  

^a Seoul National University   (South Korea)

^b Korea Institute of Science and Technology   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000268162     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.364366     Document Type: Article

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