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Journal of Applied Physics

Volumn 87, Issue 8, 2000, Pages 3744-3758

Strain and shape analysis of multilayer surface gratings by coplanar and by grazing-incidence x-ray diffraction

(3) Baumbach, T a,d Lubbert D b,d Gailhanou, M c

a FRAUNHOFER INSTITUTE FOR NON DESTRUCTIVE TESTING (Germany)

b SAARLAND UNIVERSITY (Germany)

c UNIVERSITÉ PARIS SACLAY (France)

d EUROPEAN SYNCHROTRON RADIATION FACILITY (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000261202 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.372409 Document Type: Article

Times cited : (24)

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