Damage in ion implanted silicon measured by x-ray diffraction

Journal of Applied Physics

Volumn 79, Issue 11, 1996, Pages 8278-8284

  Milita, S ^a   Servidori, M ^a  

^a CNR   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000249591     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.362482     Document Type: Review

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