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Surface Science

Volumn 195, Issue 1-2, 1988, Pages 307-329

Adsorption kinetics of SiH4, Si2H6 and Si3H8 on the Si(111)-(7×7) surface

(1) Gates, Stephen M a

a IBM T J WATSON RESEARCH CENTER (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000239384 PISSN: 00396028 EISSN: None Source Type: Journal
DOI: 10.1016/0039-6028(88)90798-4 Document Type: Article

Times cited : (222)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.