High speed layer by layer patterning of phthalocyanine Langmuir-Blodgett films by the atomic force microscope

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 5, 1996, Pages 3381-3385

  Bourgoin, J P ^a   Sudiwala, R V ^a   Palacin, S ^a  

^a CEA SACLAY   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000230011     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.588538     Document Type: Article

References (30)

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