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85033818936
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note
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2.
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20
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85033806550
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note
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2/acetone for 30 min followed by the DiCNB solution for 90 min. Experiments have shown that these soak times give optimal layer thicknesses as determined by ellipsometry.
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21
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85033816731
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note
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Ellipsometry was done using a Rudolph thin-film ellipsometer 43702-200E with a tungsten halogen light source and a 632 nm filter. Thicknesses were calculated using DafIBM (version 2.1) provided by Rudolph, assuming an index of refraction of 3.858-0.018i for the silicon substrates.
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22
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0010954811
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Baumann, V.D.1
Endres, H.2
Keller, H.J.3
Nuber, B.4
Weiss, J.5
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23
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0028765755
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Zeppenfeld, A. C.; Fiddler, S. L.; Ham, W. K.; Klopfenstein, B. J.; Page, C. J. J. Am. Chem. Soc. 1994, 116, 9158.
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Klopfenstein, B.J.4
Page, C.J.5
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24
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85033805495
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note
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Grazing angle X-ray diffraction was measured using a Scintag XDS-2000 θ-θ powder diffractometer while scanning at low angles to observe interference between X-ray reflection from the front and back of the thin films.
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26
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85033827358
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note
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ATR-FTIR spectra were obtained using polished 50 × 10 × 3 spp 45° silicon parallelogram ATR crystals using a Harrick TMP-220 ATR attachment on a Nicolet Magna IR Model 550 FT-IR spectrometer.
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27
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85033813789
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note
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Peaks were deconvoluted and peak areas were determined using Spectracalc, version A2.23 (Galactic Industries).
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28
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85033808650
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note
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-8 Torr. Survey scans were done using a 45° takeoff angle.
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