Study of a pulsed DC glow-discharge used for plasma-CVD with an ultrafast videosystem and a langmuir-probe

Materials Science Forum

Volumn 287-288, Issue , 1998, Pages 299-302

  Beer, T A ^a   Heim, D ^b   Laimer, J ^a   Stori H ^a  

^a VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

^b RUBIG GmbH & co KG Engineering   (Austria)

Author keywords

Langmuir Probe; Plasma Dynamic; Plasma CVD; Pulsed DC Discharge; Videosystem

Indexed keywords

EID: 0000217433     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/msf.287-288.299     Document Type: Article

References (2)

1. H. Amemiya: J. Phys D, Appl. Phys. 23 (1990), 999-1014
2. K.S. Mogensen, C. Mathiasen, S.S. Eskildsen, H. Störi, J. Bottiger, Surf. Coat. Technol. (in press)