High-performance and high-reliability 80-nm gate-length DTMOS with indium super steep retrograde channel

IEEE Transactions on Electron Devices

Volumn 47, Issue 12, 2000, Pages 2379-2384

  Chang, Sun Jay ^a   Chang, Chun Yen ^a   Chen, Coming ^a   Chao, Tien Sheng ^a   Lee, Yao Jen ^a   Huang, Tiao Yuan ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

DTMOS; Indium; Super steep retrograde (SSR) channel

Indexed keywords

EID: 0000209348     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/16.887025     Document Type: Article

References (14)

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