Multiple internal reflection infrared spectroscopy of silicon surface structure and oxidation process at room temperature

Journal of Applied Physics

Volumn 73, Issue 6, 1993, Pages 3018-3022

  Ling, L ^a   Kuwabara, S ^b   Abe, T ^b   Shimura, F ^a  

^a NORTH CAROLINA STATE UNIVERSITY   (United States)

^b SHIN ETSU CHEMICAL CO LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000179047     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.353007     Document Type: Article

References (0)