Optimal control of force microscope cantilevers. I. Controller design

Journal of Applied Physics

Volumn 80, Issue 4, 1996, Pages 1951-1958

  Garbini, J L ^a   Bruland, K J ^a   Dougherty, W M ^a   Sidles, J A ^b  

^a University of Washington   (United States)

^b UNIVERSITY OF WASHINGTON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000176652     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.363085     Document Type: Article

References (18)

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