Silicon High-Resistivity-Substrate Millimeter-Wave Technology

IEEE Transactions on Microwave Theory and Techniques

Volumn 34, Issue 12, 1986, Pages 1516-1521

  Buechler, Josef ^a   Russer, Peter ^a   Kasper, Erich ^b   Strohm, Karl M ^b  

^a TECHNICAL UNIVERSITY OF MUNICH   (Germany)

^b AEG   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000092929     PISSN: 00189480     EISSN: 15579670     Source Type: Journal    
DOI: 10.1109/TMTT.1986.1133572     Document Type: Article

References (10)

1. A. Rosen et. al., “Silicon as a millimeter-wave monolithically integrated substrate—A new look,” RCA Rev. vol. 42, pp. 633–660, Dec. 1981.
2. B. W. Battershall and S. D. Emmons, “Optimization of diode structures for monolithic integrated microwave circuits,” IEEE J. Solid-State Circuits, vol. SC-3, pp. 107–112, June 1968.
3. P. J. Stabile and A. Rosen, “A silicon technology for millimeter-wave monolithic circuits,” RCA Rev., vol. 45, pp. 587–605, Dec. 1984.
4. E. Kasper and K. Wörner, “High speed integrated circuit using silicon molecular beam epitaxy (SI-MBE),” J. Electrochem. Soc., vol. 132, no. 10, pp. 2481–2486, Oct. 1985.
5. K. M. Strohm, J. Hersener, and H. J. Herzog, “Stress compensated Si-membrane masks for X-ray lithography with synchrotron radiation,” in Eurocon '86 Proc. (Paris), Apr. 21-23, 1986, paper AI.4.
6. R. Brennan, “Determination of diffusion characteristics using two-and four point probe measurements,” Solid State Technol., pp. 127-132, Dec. 1984.
7. R. H. Jansen and M. Kirschning, “Arguments and an accurate model for the power-current formulation of microstrip characteristic impedance,” Arch. Elek., Übertragung, vol. 37, pp. 108-112, Mar. 1983.
8. B. S. Glance and M. V. Schneider “Millimeter-wave microstrip oscillators,” IEEE Trans. Microwave Theory Tech., pp. 1281-1283, Dec. 1974.
9. G. B. Morgan, “Microstrip IMPATT-diode oscillator for 100 GHz,” Electron. Lett., vol. 17, no. 16, pp. 570-571, Aug. 1981.
10. W. L. Stutzman and G. A. Thiele, Antenna Theory and Design. New York: Wiley, 1981, pp. 537-542.