Large-Area milky transparent conducting Al-Doped ZnO films prepared by magnetron sputtering

Japanese Journal of Applied Physics

Volumn 31, Issue 8, 1992, Pages L1106-L1109

  Minami, Tadatsugu ^a   Sato, Hirotoshi ^a   Takata, Shinzo ^a   Ogawa, Norihiro ^b   Mouri, Takashi ^b  

^a KANAZAWA INSTITUTE OF TECHNOLOGY   (Japan)

^b TOSOH CORPORATION   (Japan)

Author keywords

Al doped ZnO; Display device; Magnetron sputtering; Milky film; Smart window; Solar cell; Textured surface; Transparent conducting oxide film; Transparent electrode; Zinc oxide

Indexed keywords

ALUMINUM; FILM PREPARATION; SOLAR CELLS; SPUTTERING; SURFACES; TEXTURES;

MILKY FILMS; SMART WINDOWS;

ZINC OXIDE;

EID: 0000088303     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.31.L1106     Document Type: Article

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