Deactivation in heavily arsenic-doped silicon

Applied Physics Letters

Volumn 72, Issue 12, 1998, Pages 1492-1494

  Berding, M A ^a   Sher, A ^a   Van Schilfgaarde, M ^a   Rousseau, P M ^b   Spicer, W E ^b  

^a SRI INTERNATIONAL   (United States)

^b STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000086784     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.121036     Document Type: Article

References (19)

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