Fabrication of polymer nanodots with single electron patterning technology

Applied Physics Letters

Volumn 68, Issue 13, 1996, Pages 1799-1801

  Yoshimura, Toshiyuki ^a   Shiraishi, Hiroshi ^a   Yamamoto, Jiro ^a   Terasawa, Tsuneo ^a   Okazaki, Shinji ^a  

^a HITACHI LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000063445     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.116017     Document Type: Article

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