Thermally induced structural modifications in sputtered C/Al2O3 multilayers

Journal of Applied Physics

Volumn 83, Issue 10, 1998, Pages 5233-5238

  Veldkamp, M ^a,c   Zabel, H ^a   Morawe, Ch ^b   Arnscheidt, B ^a,d  

^a RUHR UNIVERSITY BOCHUM   (Germany)

^b EUROPEAN SYNCHROTRON RADIATION FACILITY   (France)

^c HAHN MEITNER INSTITUT   (Germany)

^d Quantum   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000061222     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.367344     Document Type: Article

References (14)

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