Nucleation of cubic boron nitride (c-BN) with ion-induced plasma-enhanced CVD

Diamond and Related Materials

Volumn 4, Issue 4, 1995, Pages 375-380

  Kuhr, M ^a   Reinke, S ^a   Kulisch, W ^a  

^a UNIVERSITY OF KASSEL   (Germany)

Author keywords

Cubic boron nitride; Ion assisted deposition; Nucleation and growth; PECVD

Indexed keywords

EID: 0000043758     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/0925-9635(94)05310-3     Document Type: Article

References (18)

1. Normal Modes in Hexagonal Boron Nitride
2. Effects of the substrate bias on the formation of cubic boron nitride by inductively coupled plasma enhanced chemical vapor deposition
3. Borverbindungen