|
|
Volumn 75, Issue 7, 1994, Pages 3678-3680
|
|
Dissolution kinetics of D defects in Czochralski silicon
|
|
Author keywords
[No Author keywords available]
|
|
Indexed keywords
|
|
EID: 0000039518
PISSN: 00218979
EISSN: None
Source Type: Journal
DOI: 10.1063/1.356084 Document Type: Article |
|
Times cited : (16)
|
|
References (0)
|
